Publications

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Filters: Author is Padmore, H. A.  [Clear All Filters]
1994
E. Louis, H.J Voorma, N.B Koster, L. Shmaenok, F. Bijkerk, R. Schlatmann, J. Verhoeven, Y.Y Platonov, G.E van Dorssen, H.A Padmore,  Enhancement of Reflectivity of Multilayer Mirrors for Soft-X-Ray Projection Lithography by Temperature Optimization and Ion-Bombardment, Microelectronic Engineering 1-423 (1994) 215-218.
1991
E.J Puik, G.E van Dorssen, M.J van der Wiel, J. Verhoeven, G. Vanderlaan, H.A Padmore,  Characterization of the Resolving Power of a Double Multilayer Monochromator in the Energy-Range of 600-900 Ev, Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 69 (1991) 3142-3148.