Publications
Enhancement of Reflectivity of Multilayer Mirrors for Soft-X-Ray Projection Lithography by Temperature Optimization and Ion-Bombardment, Microelectronic Engineering 1-423 (1994) 215-218.
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Characterization of the Resolving Power of a Double Multilayer Monochromator in the Energy-Range of 600-900 Ev, Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films 69 (1991) 3142-3148.
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