Publications
Plasma probe characteristics in low density hydrogen pulsed plasmas, Plasma Sources Sci. Technol. 24 (2015) 055018.
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Characterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light source, Appl. Surf. Sci. 353 (2015) 708-713.
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Temperature dependencies of hydrogen-induced blistering of thin film multilayers, J. Appl. Phys. 115 (2014) 173510.
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2014_56992.pdf (633.32 KB)
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Comparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmas, J. Phys. D-Appl. Phys. 47 (2014) 065205.
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Spectral purification and infrared light recycling in extreme ultraviolet lithography sources, Opt. Express 22 (2014) 8633-8639.
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Model independent X-ray standing wave analysis of periodic multilayer structures, J. Appl. Phys. 115 (2014) 134303.
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High efficiency structured EUV multilayer mirror for spectral filtering of long wavelengths, Opt. Express 22 (2014) 19365-19374.
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Combined EUV reflectance and X-ray reflectivity data analysis of periodic multilayer structures, Opt. Express 22 (2014) 20076–20086.
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Graphene defect formation by extreme ultraviolet generated photoelectrons, J. Appl. Phys. 5116 (2014) 054312.
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Subwavelength single layer absorption resonance antireflection coatings, Opt. Express 122 (2014) 490–497.
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Defect formation in single layer graphene under extreme ultraviolet irradiation, Appl. Surf. Sci. 317 (2014) 745-751.
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Single-order operation of lamellar multilayer gratings in the soft x-ray spectral range, AIP Adv. 13 (2013) 012103.
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Real-space insight in the nanometer scale roughness development during growth and ion beam polishing of molybdenum silicon multilayer films, Appl. Surf. Sci. 285, Part B (2013) 293-299.
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Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography, Appl. Phys. Lett. 22103 (2013) 221114.
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Enhanced thermal stability of extreme ultraviolet multilayers by balancing diffusion-induced structural changes, Appl. Phys. Lett. 9103 (2013) 093105.
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Ion effects in hydrogen-induced blistering of Mo/Si multilayers, J. Appl. Phys. 114 (2013) 113507.
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2013_53977.pdf (561.76 KB)
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