Publications
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Author Title Type [ Year
Filters: Author is van den Boogaard, A. J. R. [Clear All Filters]
Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors, Opt. Express 1421 (2013) 16964-16974.
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Influence of noble gas ion polishing species on extreme ultraviolet mirrors, J. Appl. Phys. 12112 (2012) 123502.
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Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection, Opt. Lett. 237 (2012) 160-162.
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Characterization of Mo/Si multilayer growth on stepped topographies, J. Vac. Sci. Technol. B 29 (2011) 6.
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