Publications

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Filters: Author is van den Boogaard, A. J. R.  [Clear All Filters]
2013
V.V Medvedev, A.JR van den Boogaard, R. van der Meer, A.E Yakshin, E. Louis, V.M Krivtsun, F. Bijkerk,  Infrared diffractive filtering for extreme ultraviolet multilayer Bragg reflectors, Opt. Express 1421 (2013) 16964-16974.
OA 
2012
A.JR van den Boogaard, E. Zoethout, I.A Makhotkin, E. Louis, F. Bijkerk,  Influence of noble gas ion polishing species on extreme ultraviolet mirrors, J. Appl. Phys. 12112 (2012) 123502.
A.JR van den Boogaard, F.A van Goor, E. Louis, F. Bijkerk,  Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection, Opt. Lett. 237 (2012) 160-162.
2011
A.JR van den Boogaard,  Ion-enhanced growth in planar and structured Mo/Si multilayers, PhD (2011) 
A.JR van den Boogaard, E. Louis, E. Zoethout, K.A Goldberg, F. Bijkerk,  Characterization of Mo/Si multilayer growth on stepped topographies, J. Vac. Sci. Technol. B 29 (2011) 6.
OA 
2010
A.JR van den Boogaard, E. Louis, E. Zoethout, S. Mullender, F. Bijkerk,  Surface morphology of Kr+-polished amorphous Si layers, J. Vac. Sci. Technol. A 428 (2010) 552-558.