Publications
Mo/Si multilayer-coated amplitude-division beam splitters for XUV radiation sources, J. Synchrotron Rad. 20 (2013) 249-257.
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Wavelength separation from extreme ultraviolet mirrors using phaseshift reflection, Opt. Lett. 237 (2012) 160-162.
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Ion assisted growth of B4C diffusion barrier layers in Mo/Si multilayered structures, J. Appl. Phys. 111 (2012) 064303.
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In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers, Appl. Surf. Sci. 258 (2011) 7-12.
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Characterization of Mo/Si multilayer growth on stepped topographies, J. Vac. Sci. Technol. B 29 (2011) 6.
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In-situ study of the diffusion-reaction mechanism in Mo/Si multilayered films, Appl. Surf. Sci. 257 (2011) 2707-2711.
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Atomic O and H exposure of C-covered and oxidized d-metal surfaces, Surf. Sci. 16603 (2009) 2594-2599.
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Microstructure of Mo/Si multilayers with B4C diffusion barrier layers, Appl. Optics 248 (2009) 155-160.
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