DIFFER Seminar: The Advanced Research Center for NanoLithography: a public private partnership inspired by challenges from ASML

Abstract: ARCNL in Amsterdam started in 2014 as one of the NWO-I institutes, like DIFFER. ARCNL differs from the other NWO-I institutes being a public private partnership between ASML and the University of Amsterdam, The Vrije Universiteit Amsterdam, and the University of Groningen. ARCNL focuses on fundamental physics and chemistry in the context of technologies for nanolithography, primarily for the semiconductor industry. As ASML is making the most complex machines ever made my mankind, the challenges in physics and chemistry are comparably enormous. In this talk the challenges of ASML are reflected against highlights from ARCNL's science program, which will show that this public-private partnership not only shortens the distance between proof-of-concept and introduction in a development cycle but also provides a stage for fun physics and chemistry.