Dobrovolskiy, S., Yakshin, A. E., Tichelaar, F. D., Verhoeven, J., Louis, E., & Bijkerk, F. (2010). Formation of Si/SiC multilayers by low-energy ion implantation and thermal annealing. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms, 268, 560-567. Retrieved from <Go to ISI>://000276053700004 (Original work published 2025)
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