DIFFER
DIFFER Publication
The application of energetic CHx+ ions to form a Si/SiC multilayer system for reflection of radiation between 20 and 80 nm
| Author | |
| Year of Publication |
2005
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| Journal |
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
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| Volume |
237
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| Number |
3-4
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| Number of Pages |
533-542
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| Date Published |
Aug
|
| ISBN Number |
0168-583X
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| Accession Number |
ISI:000231777800006
|
| URL |
<Go to ISI>://000231777800006
|
| PId |
8d841e086a3df309bab49aeeab93b4e4
|
Journal Article
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| Download citation |