DIFFER
DIFFER Publication
The application of energetic CHx+ ions to form a Si/SiC multilayer system for reflection of radiation between 20 and 80 nm
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2005
|
| Journal |
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
|
| Volume |
237
|
| Number |
3-4
|
| Number of Pages |
533-542
|
| Date Published |
08/2005
|
| ISBN Number |
0168-583X
|
| Accession Number |
ISI:000231777800006
|
| URL | |
| PId |
8d841e086a3df309bab49aeeab93b4e4
|
Journal Article
|
|
| Download citation |