Chen, J. Q., Louis, E. ., Wormeester, H. ., Harmsen, R. ., van de Kruijs, R. ., Lee, C. J., … Bijkerk, F. . (2011). Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry. Measurement Science & Technology, 22(10), 105705. https://doi.org/10.1088/0957-0233/22/10/105705 (Original work published 2025)
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