DIFFER

A. M. Yakunin

First name
A.
Middle name
M.
Last name
Yakunin
Makhotkin, I. A., Zoethout, E. ., van de Kruijs, R. ., Yakunin, S. N., Louis, E. ., Yakunin, A. M., … Bijkerk, F. . (2013). Short period La/B and LaN/B multilayer mirrors for similar to 6.8 nm wavelength. Optics Express, 21, 29894-29904. https://doi.org/10.1364/oe.21.029894 (Original work published 2025)
Medvedev, V. V., van de Kruijs, R. W. E., Yakshin, A. E., Novikova, N. N., Krivtsun, V. M., Louis, E. ., … Bijkerk, F. . (2013). Multilayer mirror with enhanced spectral selectivity for the next generation extreme ultraviolet lithography. Applied Physics Letters, 103, 221114. https://doi.org/10.1063/1.4837335
Makhotkin, I. A., Zoethout, E. ., Louis, E. ., Yakunin, A. M., Mullender, S. ., & Bijkerk, F. . (2012). Spectral properties of La/B - based multilayer mirrors near the boron K absorption edge. Optics Express, 20(11), 11778-11786. https://doi.org/10.1364/OE.20.011778 (Original work published 2025)
Makhotkin, I. ., Zoethout, E. ., Louis, E. ., Yakunin, A. M., Muellender, S. ., & Bijkerk, F. . (2012). Wavelength selection for multilayer coatings for lithography generation beyond extreme ultraviolet. Journal of Micro Nanolithography, MEMS and MOEMS, 11, 040501. https://doi.org/10.1117/1.JMM.11.4.040501 (Original work published)
Medvedev, V. V., Yakshin, A. E., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. N., & Bijkerk, F. . (2012). Infrared antireflective filtering for extreme ultraviolet multilayer Bragg reflectors. Optics Letters, 37(7), 1169-1171. https://doi.org/10.1364/OL.37.001169 (Original work published 2025)
Medvedev, V. V., Yakshin, A. E., van de Kruijs, R. W. E., Krivtsun, V. M., Yakunin, A. M., Koshelev, K. N., & Bijkerk, F. . (2011). Infrared suppression by hybrid EUV multilayer-IR etalon structures. Optics Letters, 36(17), 3344-3346. https://doi.org/10.1364/OL.36.003344 (Original work published 2025)