N. Leick

Leick, N., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M., & Kessels, W. M. M. (2016). Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504). Journal of Physics D: Applied Physics, 49(26), 269601. https://doi.org/10.1088/0022-3727/49/26/269601

Leick, N., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M., & Kessels, W. M. M. (2016). In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd. Journal of Physics D: Applied Physics, 49(11), 115504. https://doi.org/10.1088/0022-3727/49/11/115504

Leick, N., Verkuijlen, R. O. F., Lamagna, L., Langereis, E., Rushworth, S., Roozeboom, F., … Kessels, W. M. M. (2011). Atomic layer deposition of Ru from CpRu(CO)(2)Et using O-2 gas and O-2 plasma. Journal of Vacuum Science & Technology A, 29(2), 021016. https://doi.org/10.1116/1.3554691 (Original work published 2011)