DIFFER
DIFFER Publication
Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504)
| Label | Value |
|---|---|
| Author | |
| Abstract |
Figure 6 was incorrectly edited in the above paper. The corrected figure is given. |
| Year of Publication |
2016
|
| Journal |
Journal of Physics D: Applied Physics
|
| Volume |
49
|
| Issue |
26
|
| Number of Pages |
269601
|
| DOI | |
| PId |
35e140fdd6848c6a7bda5568d48829a9
|
| Alternate Journal |
J. Phys. D: Appl. Phys.
|
Journal Article
|
|
| Download citation |