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Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504)

Label Value
Author
N. Leick
J. W. Weber
A. J. M. Mackus
M. J. Weber
M. C. M. van de Sanden
W. M. M. Kessels
Abstract

Figure 6 was incorrectly edited in the above paper. The corrected figure is given.
Year of Publication
2016
Journal
Journal of Physics D: Applied Physics
Volume
49
Issue
26
Number of Pages
269601
DOI
10.1088/0022-3727/49/26/269601
PId
35e140fdd6848c6a7bda5568d48829a9
Alternate Journal
J. Phys. D: Appl. Phys.
Journal Article
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Citation
Leick, N., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M., & Kessels, W. M. M. (2016). Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504). Journal of Physics D: Applied Physics, 49(26), 269601. https://doi.org/10.1088/0022-3727/49/26/269601