DIFFER

A. J. M. Mackus

First name
A.
Middle name
J. M.
Last name
Mackus
Leick, N. ., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M., & Kessels, W. M. M. (2016). Erratum: In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd (2016 J. Phys. D: Appl. Phys . 49 115504). Journal of Physics D: Applied Physics, 49(26), 269601. https://doi.org/10.1088/0022-3727/49/26/269601
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Leick, N. ., Weber, J. W., Mackus, A. J. M., Weber, M. J., van de Sanden, M. C. M., & Kessels, W. M. M. (2016). In situ spectroscopic ellipsometry during atomic layer deposition of Pt, Ru and Pd. Journal of Physics D: Applied Physics, 49(11), 115504. https://doi.org/10.1088/0022-3727/49/11/115504
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