Zhao, C., Lu, X., He, P., Zhang, P., Sun, W., Zhang, J., … Gou, F. (2012). CF3+ etching silicon surface: A molecular dynamics study. Vacuum, 86(7), 913-916. https://doi.org/10.1016/j.vacuum.2011.06.003 (Original work published 2025)
DIFFER
W. Sun
First name
W.
Last name
Sun
Chen, X., Lu, X., He, P., Zhao, C., Sun, W., Zhang, P., & Gou, F. (2012). Deposition and etching of SiF2 on Si surface: MD study. Physics Procedia, 32, 885-890. https://doi.org/10.1016/j.phpro.2012.03.652
Sun, W., Liu, H., Lin, L., Zhao, C. L., Lu, X. D., He, P. N., & Gou, F. (2012). Molecular Dynamics Simulations of Atomic H Etching SiC Surface. Physics Procedia, 32, 539–544. https://doi.org/10.1016/j.phpro.2012.03.598 (Original work published 2012)