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DIFFER
DIFFER Publication
Deposition and etching of SiF2 on Si surface: MD study
Label
Value
Author
X. Chen
X. Lu
P. He
C. Zhao
W. Sun
P. Zhang
F. Gou
Year of Publication
2012
Journal
Physics Procedia
Volume
32
Number of Pages
885-890
DOI
10.1016/j.phpro.2012.03.652
PId
d9c32570364217e34f604627a55dd44e
Alternate Journal
Phys. Procedia
Label
OA
Journal Article
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