DIFFER
DIFFER Publication
Deposition and etching of SiF2 on Si surface: MD study
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Journal |
Physics Procedia
|
| Volume |
32
|
| Number of Pages |
885-890
|
| DOI | |
| PId |
d9c32570364217e34f604627a55dd44e
|
| Alternate Journal |
Phys. Procedia
|
| Label |
OA
|
Journal Article
|
|
| Download citation |
Citation
Chen, X., Lu, X., He, P., Zhao, C., Sun, W., Zhang, P., & Gou, F. (2012). Deposition and etching of SiF2 on Si surface: MD study. Physics Procedia, 32, 885-890. https://doi.org/10.1016/j.phpro.2012.03.652