DIFFER
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Deposition and etching of SiF2 on Si surface: MD study

Label Value
Author
Year of Publication
2012
Journal
Physics Procedia
Volume
32
Number of Pages
885-890
DOI
PId
d9c32570364217e34f604627a55dd44e
Alternate Journal
Phys. Procedia
Label
OA
Journal Article
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Citation
Chen, X., Lu, X., He, P., Zhao, C., Sun, W., Zhang, P., & Gou, F. (2012). Deposition and etching of SiF2 on Si surface: MD study. Physics Procedia, 32, 885-890. https://doi.org/10.1016/j.phpro.2012.03.652