F. Gou

Zhao, C. ., Lu, X. ., He, P. ., Zhang, P. ., Sun, W. ., Zhang, J. ., … Gou, F. . (2012). CF3+ etching silicon surface: A molecular dynamics study. Vacuum, 86(7), 913-916. https://doi.org/10.1016/j.vacuum.2011.06.003 (Original work published 2024)

Chen, X. ., Lu, X. ., He, P. ., Zhao, C. ., Sun, W. ., Zhang, P. ., & Gou, F. . (2012). Deposition and etching of SiF2 on Si surface: MD study. Physics Procedia, 32, 885-890. https://doi.org/10.1016/j.phpro.2012.03.652

Sun, W. ., Liu, H. ., Lin, L. ., Zhao, C. L., Lu, X. D., He, P. N., & Gou, F. . (2012). Molecular Dynamics Simulations of Atomic H Etching SiC Surface. Physics Procedia, 32, 539–544. https://doi.org/10.1016/j.phpro.2012.03.598 (Original work published 2012)

Lu, X. D., Qin, Y. ., Ning, J. ., Zhou, T. ., . Y. Deng, C. ., Meng, C. ., … Ming, J. . (2009). Film growth by polyatomic C2H5+ bombarding a diamond (100) surfaces: Molecular dynamics study. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500068

Gou, F. ., Gleeson, M. A., Kleyn, A. W., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. . (2009). Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500070

Lu, X. ., Ning, J. ., Qin, Y. ., Qian, Q. ., Chuanwu, Z. ., Ying, Y. ., … Gou, F. . (2009). Substrate temperature effect on F+ etching of SiC: Molecular dynamics simulation. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500067

Lu, X. ., Qin, Y. ., Ning, J. ., Zhou, T. ., . Y. Deng, C. ., Meng, C. ., … Gou, F. . (2009). Molecular dynamics simulations of CH+ ions interaction with silicon carbide. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500069

Gou, F. ., Kleyn, A. W., & Gleeson, M. A. (2008). The application of molecular dynamics to the study of plasma-surface interactions: CFx with silicon. International Reviews in Physical Chemistry, 27, 229-271. Retrieved from <Go to ISI>://000254650900003

Gou, F. ., Zen, L. T., & Meng, C. L. (2008). Molecular dynamics simulations of CF3 etching of SiC. Thin Solid Films, 516, 1832-1837. Retrieved from <Go to ISI>://000253872200027 (Original work published 2024)

Gou, F. ., Gleeson, M. A., & Kleyn, A. W. (2007). Molecular dynamics simulation of CH3 interaction with Si(100) surface. Surface Science, 601, 3965-3969. Retrieved from <Go to ISI>://000250414600062 (Original work published 2024)