DIFFER

E. C. I. Turcu

First name
E.
Middle name
C. I.
Last name
Turcu
Bijkerk, F. ., Louis, E. ., Turcu, E. C. I., & Tallents, G. J. (1992). High Repetition Rate Krf Laser Plasma X-Ray Source for Microlithography. Microelectronic Engineering, 17, 219-222. https://doi.org/10.1016/0167-9317(92)90045-s (Original work published 2024)
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