J. Palmans

Perrotta, A., Aresta, G., van Beekum, E. R. J., Palmans, J., van de Weijer, P., van de Sanden, M. C. M., … Creatore, M. (2015). The impact of the nano-pore filling on the performance of organosilicon-based moisture barriers. Thin Solid Films, 595, Part B, 251-257. https://doi.org/10.1016/j.tsf.2015.05.026 (Original work published 2015)

Bronneberg, A. C., Kang, X., Palmans, J., Janssen, P. H. J., Lorne, T., Creatore, M., & van de Sanden, M. C. M. (2013). Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition. Journal of Applied Physics, 114(6), 063305. https://doi.org/10.1063/1.4817859

Aresta, G., Palmans, J., van de Sanden, M. C. M., & Creatore, M. (2012). Evidence of the filling of nano-porosity in SiO2-like layers by an initiated-CVD monomer. Microporous and Mesoporous Materials, 151, 434-439. https://doi.org/10.1016/j.micromeso.2011.09.028 (Original work published 2025)

Aresta, G., Palmans, J., van de Sanden, M. C. M., & Creatore, M. (2012). Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition. Journal of Vacuum Science & Technology A, 30(4), 11. https://doi.org/10.1116/1.4711762 (Original work published 2025)