DIFFER
DIFFER Publication
Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2013
|
| Journal |
Journal of Applied Physics
|
| Volume |
114
|
| Issue |
6
|
| Number of Pages |
063305
|
| Publisher |
AIP
|
| DOI | |
| PId |
f28f13b357142df153fc29842934c477
|
| Alternate Journal |
J. Appl. Phys.
|
Journal Article
|
|
| Download citation |