DIFFER
DIFFER Publication
Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2013
|
| Journal |
Journal of Applied Physics
|
| Volume |
114
|
| Issue |
6
|
| Number of Pages |
063305
|
| Publisher |
AIP
|
| DOI | |
| PId |
f28f13b357142df153fc29842934c477
|
| Alternate Journal |
J. Appl. Phys.
|
Journal Article
|
|
| Download citation |
Citation
Bronneberg, A. C., Kang, X., Palmans, J., Janssen, P. H. J., Lorne, T., Creatore, M., & van de Sanden, M. C. M. (2013). Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition. Journal of Applied Physics, 114(6), 063305. https://doi.org/10.1063/1.4817859