P. H. J. Janssen

Bronneberg, A. C., Kang, X. ., Palmans, J. ., Janssen, P. H. J., Lorne, T. ., Creatore, M. ., & van de Sanden, M. C. M. (2013). Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition. Journal of Applied Physics, 114(6), 063305. https://doi.org/10.1063/1.4817859