DIFFER
DIFFER Publication
Modeling of dust in a silane/hydrogen plasma
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2003
|
| Journal |
Journal of Applied Physics
|
| Volume |
94
|
| Number |
1
|
| Number of Pages |
104-109
|
| Date Published |
Jul
|
| ISBN Number |
0021-8979
|
| Accession Number |
ISI:000183642900011
|
| URL | |
| PId |
869a731c005d286db8c83e3c0c67ff78
|
Journal Article
|
|
| Download citation |