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A one-dimensional fluid model for an acetylene RF discharge: A study of the plasma chemistry

Author
Year of Publication
2003
Journal
IEEE Transactions on Plasma Science
Volume
31
Number
4
Number of Pages
659-664
Date Published
Aug
ISBN Number
0093-3813
Accession Number
ISI:000184833400022
URL
<Go to ISI>://000184833400022
PId
5caf292623fa0b2ebb4903866264c6c6
Journal Article
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