DIFFER
DIFFER Publication
A one-dimensional fluid model for an acetylene RF discharge: A study of the plasma chemistry
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2003
|
| Journal |
IEEE Transactions on Plasma Science
|
| Volume |
31
|
| Number |
4
|
| Number of Pages |
659-664
|
| Date Published |
08/2003
|
| ISBN Number |
0093-3813
|
| Accession Number |
ISI:000184833400022
|
| URL | |
| PId |
5caf292623fa0b2ebb4903866264c6c6
|
Journal Article
|
|
| Download citation |
Citation
Herrebout, D., Bogaerts, A., Gijbels, R., Goedheer, W. J., & Vanhulsel, A. (2003). A one-dimensional fluid model for an acetylene RF discharge: A study of the plasma chemistry. IEEE Transactions on Plasma Science, 31, 659-664. Retrieved from <Go to ISI>://000184833400022 (Original work published 2003)