DIFFER
DIFFER Publication
Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2004
|
| Journal |
IEEE Transactions on Plasma Science
|
| Volume |
32
|
| Number |
2
|
| Number of Pages |
691-698
|
| Date Published |
Apr
|
| ISBN Number |
0093-3813
|
| Accession Number |
ISI:000222278400026
|
| URL | |
| PId |
2089961e713cccf004a611536373187c
|
Journal Article
|
|
| Download citation |