DIFFER
DIFFER Publication
Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2004
|
| Journal |
IEEE Transactions on Plasma Science
|
| Volume |
32
|
| Number |
2
|
| Number of Pages |
691-698
|
| Date Published |
04/2004
|
| ISBN Number |
0093-3813
|
| Accession Number |
ISI:000222278400026
|
| URL | |
| PId |
2089961e713cccf004a611536373187c
|
Journal Article
|
|
| Download citation |
Citation
De Bleecker, K., Bogaerts, A., Goedheer, W., & Gijbels, R. (2004). Investigation of growth mechanisms of clusters in a silane discharge with the use of a fluid model. IEEE Transactions on Plasma Science, 32, 691-698. Retrieved from <Go to ISI>://000222278400026 (Original work published 2004)