DIFFER
DIFFER Publication
Modeling of the formation and transport of nanoparticles in silane plasmas
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2004
|
| Journal |
Physical Review E
|
| Volume |
70
|
| Number |
5
|
| Date Published |
Nov
|
| ISBN Number |
1063-651X
|
| Accession Number |
ISI:000225970700092
|
| URL | |
| PId |
7c5a25075eb3f57634addebc48a41237
|
Journal Article
|
|
| Download citation |