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Modeling of the formation and transport of nanoparticles in silane plasmas

Label Value
Author
Year of Publication
2004
Journal
Physical Review E
Volume
70
Number
5
Date Published
11/2004
ISBN Number
1063-651X
Accession Number
ISI:000225970700092
URL
PId
7c5a25075eb3f57634addebc48a41237
Journal Article
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Citation
De Bleecker, K., Bogaerts, A., & Goedheer, W. (2004). Modeling of the formation and transport of nanoparticles in silane plasmas. Physical Review E, 70. Retrieved from <Go to ISI>://000225970700092 (Original work published 2004)