DIFFER
DIFFER Publication
Ion-enhanced growth in planar and structured Mo/Si multilayers
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2011
|
| Degree |
PhD
|
| Date Published |
12/2011
|
| Thesis Type |
PhD
|
| University |
University of Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789461911209
|
| URL | |
| PId |
78bc5b75cdd6acb78f0f5f23ad684ea9
|
Thesis
|
|
| Download citation |
Citation
van den Boogaard, A. J. R. (2011). Ion-enhanced growth in planar and structured Mo/Si multilayers (University of Twente). University of Twente, Enschede, Netherlands. Retrieved from http://doc.utwente.nl/78771/ (Original work published 2011)