DIFFER
DIFFER Publication
Ion-enhanced growth in planar and structured Mo/Si multilayers
| Author | |
| Year of Publication |
2011
|
| Degree |
PhD
|
| Date Published |
13 December 2011
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| Thesis Type |
PhD
|
| University |
University of Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789461911209
|
| URL |
http://doc.utwente.nl/78771/
|
| PId |
78bc5b75cdd6acb78f0f5f23ad684ea9
|
Thesis
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| Download citation |