DIFFER
DIFFER Publication
RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation (vol 11, 021112, 2012)
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Journal |
Journal of Micro-Nanolithography Mems and Moems
|
| Volume |
11
|
| Issue |
2
|
| Number of Pages |
029802
|
| Date Published |
Apr-Jun
|
| Type of Article |
Correction
|
| ISBN Number |
1932-5150
|
| DOI | |
| PId |
cf745ab973714c7de7cf01f0e9ace3d2
|
| Alternate Journal |
J. Micro-Nanolithogr. MEMS MOEMS
|
| Label |
OA
|
Journal Article
|
|
| Download citation |