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Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Label Value
Author
Year of Publication
2013
Degree
PhD
Date Published
2013/07/04
Thesis Type
PhD
University
Universiteit Twente
City
Enschede, Netherlands
ISBN Number
9789461917942
URL
PId
86962122adaf68b8945cd34b0188a382
Thesis
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Citation
Bosgra, J. (2013). Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation (Universiteit Twente). Universiteit Twente, Enschede, Netherlands. Retrieved from http://doc.utwente.nl/89206/1/thesis_J_Bosgra.pdf (Original work published)