DIFFER
DIFFER Publication
Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2013
|
| Degree |
PhD
|
| Date Published |
2013/07/04
|
| Thesis Type |
PhD
|
| University |
Universiteit Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789461917942
|
| URL | |
| PId |
86962122adaf68b8945cd34b0188a382
|
Thesis
|
|
| Download citation |