DIFFER
DIFFER Publication
Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2014
|
| Journal |
Journal of Applied Physics
|
| Volume |
115
|
| Issue |
24
|
| Number of Pages |
244301
|
| DOI | |
| PId |
128cbb15c2b9415f48fa4bf173cc93e3
|
Journal Article
|
|
| Download citation |
Citation
Dogan, I., Weeks, S. L., Agarwal, S., & van de Sanden, M. C. M. (2014). Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation. Journal of Applied Physics, 115(24), 244301. https://doi.org/http://dx.doi.org/10.1063/1.4885195