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DIFFER
DIFFER Publication
Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation
Label
Value
Author
I. Dogan
S. L. Weeks
S. Agarwal
M. C. M. van de Sanden
Year of Publication
2014
Journal
Journal of Applied Physics
Volume
115
Issue
24
Number of Pages
244301
DOI
http://dx.doi.org/10.1063/1.4885195
PId
128cbb15c2b9415f48fa4bf173cc93e3
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