DIFFER
DIFFER Publication
Nucleation of silicon nanocrystals in a remote plasma without subsequent coagulation
| Author | |
| Year of Publication |
2014
|
| Journal |
Journal of Applied Physics
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| Volume |
115
|
| Issue |
24
|
| Number of Pages |
244301
|
| DOI |
http://dx.doi.org/10.1063/1.4885195
|
| PId |
128cbb15c2b9415f48fa4bf173cc93e3
|
Journal Article
|
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| Download citation |