DIFFER
DIFFER Publication
Thermally induced diffusion phenomena and compound interlayer structural changes in EUV multilayers
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2014
|
| Degree |
PhD
|
| Date Published |
2014/02/07
|
| Thesis Type |
PhD
|
| University |
Universiteit Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789462590700
|
| URL | |
| PId |
e26cd014c91d4d74b1cff4da7ddc27de
|
Thesis
|
|
| Download citation |