DIFFER
DIFFER Publication

Atmospheric pressure-plasma enhanced chemical vapour deposition of silica. Characterisation and control of porosity in multi-layer encapsulation films

Label Value
Author
Year of Publication
2018
Degree
PhD
Date Published
2018/01/16
Thesis Type
PhD
University
Eindhoven University of Technology
City
Eindhoven, Netherlands
ISBN Number
9789038644172
URL
PId
257ba3d08abaa18c590c02a8950131f7
Thesis
Download citation