DIFFER
DIFFER Publication
Atmospheric pressure-plasma enhanced chemical vapour deposition of silica. Characterisation and control of porosity in multi-layer encapsulation films
| Author | |
| Year of Publication |
2018
|
| Degree |
PhD
|
| Date Published |
2018/01/16
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| Thesis Type |
PhD
|
| University |
Eindhoven University of Technology
|
| City |
Eindhoven, Netherlands
|
| ISBN Number |
9789038644172
|
| URL |
https://research.tue.nl/nl/publications/atmospheric-pressure-plasma-enhanced-chemical-vapour-deposition-o
|
| PId |
257ba3d08abaa18c590c02a8950131f7
|
Thesis
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| Download citation |