R. van de Kruijs

Makhotkin, I. A., Zoethout, E. ., van de Kruijs, R. ., Yakunin, S. N., Louis, E. ., Yakunin, A. M., … Bijkerk, F. . (2013). Short period La/B and LaN/B multilayer mirrors for similar to 6.8 nm wavelength. Optics Express, 21, 29894-29904. https://doi.org/10.1364/oe.21.029894 (Original work published 2025)

Chen, J. Q., Louis, E. ., Wormeester, H. ., Harmsen, R. ., van de Kruijs, R. ., Lee, C. J., … Bijkerk, F. . (2011). Carbon-induced extreme ultraviolet reflectance loss characterized using visible-light ellipsometry. Measurement Science & Technology, 22(10), 105705. https://doi.org/10.1088/0957-0233/22/10/105705 (Original work published 2025)

Chen, J. Q., Louis, E. ., Harmsen, R. ., Tsarfati, T. ., Wormeester, H. ., van Kampen, M. ., … Bijkerk, F. . (2011). In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers. Applied Surface Science, 258(1), 7-12. https://doi.org/10.1016/j.apsusc.2011.07.121 (Original work published 2025)

Tsarfati, T. ., Zoethout, E. ., van de Kruijs, R. ., & Bijkerk, F. . (2009). In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000264774000156 (Original work published 2025)

Tsarfati, T. ., Zoethout, E. ., van de Kruijs, R. ., & Bijkerk, F. . (2009). Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000266500100134 (Original work published 2025)

Wu, S. M., van de Kruijs, R. ., Zoethout, E. ., & Bijkerk, F. . (2009). Sputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment. Journal of Applied Physics, 106, 6. Retrieved from <Go to ISI>://000269850300134 (Original work published 2025)

Tsarfati, T. ., Zoethout, E. ., van de Kruijs, R. ., & Bijkerk, F. . (2009). Growth and sacrificial oxidation of transition metal nanolayers. Surface Science, 603, 1041-1045. Retrieved from <Go to ISI>://000265310000013 (Original work published 2025)

Mertens, B. ., Weiss, M. ., Meiling, H. ., Klein, R. ., Louis, E. ., Kurt, R. ., … van de Kruijs, R. . (2004). Progress in EUV optics lifetime expectations. Microelectronic Engineering, 73-74, 16-22. Retrieved from <Go to ISI>://000222145400005 (Original work published 2025)