DIFFER

T. Tsarfati

First name
T.
Last name
Tsarfati
Louis, E., Yakshin, A. E., Tsarfati, T., & Bijkerk, F. (2011). Nanometer interface and materials control for multilayer EUV-optical applications. Progress in Surface Science, 86(11-12), 255-294. https://doi.org/10.1016/j.progsurf.2011.08.001 (Original work published 2011)
Chen, J. Q., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., … Bijkerk, F. (2011). In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers. Applied Surface Science, 258(1), 7-12. https://doi.org/10.1016/j.apsusc.2011.07.121 (Original work published 2011)
Tsarfati, T., van de Kruijs, R. W. E., Zoethout, E., Louis, E., & Bijkerk, F. (2010). Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics. Thin Solid Films, 518, 7249-7252. Retrieved from <Go to ISI>://000282915100017 (Original work published 2010)
Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000264774000156 (Original work published 2009)
Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000266500100134 (Original work published 2009)
Tsarfati, T. (2009). Surface and interface dynamics in multilayered structures (University of Twente). University of Twente, Enschede, Netherlands. Retrieved from http://doc.utwente.nl/61676/
Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). Growth and sacrificial oxidation of transition metal nanolayers. Surface Science, 603, 1041-1045. Retrieved from <Go to ISI>://000265310000013 (Original work published 2009)
Tsarfati, T., van de Kruijs, R. W., Zoethout, E., Louis, E., & Bijkerk, F. (2009). Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518, 1365-1368. Retrieved from <Go to ISI>://000272861500002 (Original work published 2009)
Tsarfati, T., Zoethout, E., van de Kruijs, R. W. E., & Bijkerk, F. (2009). Atomic O and H exposure of C-covered and oxidized d-metal surfaces. Surface Science, 603, 2594-2599. Retrieved from <Go to ISI>://000269415500036 (Original work published 2009)