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Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics

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Abstract

Chemical diffusion and interlayer formation in thin layers and at interfaces is of increasing influence in nanoscopic devices such as nano-electronics, magneto-optical storage and multilayer X-ray optics. We show that with the nitridation of reactive B4C/La interfaces, both the chemical and optical contrast can be greatly enhanced. Although interaction and diffusion of N-2 from the substrate towards the adlayer does occur, this surfactant mediated growth contributes to chemical and optical interface properties that enable major reflectivity improvements of multilayer optics for 6.7

Year of Publication
2010
Journal
Thin Solid Films
Volume
518
Number
24
Number of Pages
7249-7252
Date Published
Oct
Type of Article
Article
ISBN Number
0040-6090
Accession Number
ISI:000282915100017
URL
PId
bf172f5ad9b1c95543347e3c218f4856
Alternate Journal
Thin Solid Films
Journal Article
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