M. C. M. van de Sanden

Knoops, H. C. M., Donders, M. E., van de Sanden, M. C. M., Notten, P. H. L., & Kessels, W. M. M. (2012). Atomic layer deposition for nanostructured Li-ion batteries. Journal of Vacuum Science & Technology A, 30(1), 010801. https://doi.org/10.1116/1.3660699 (Original work published 2012)

Hoex, B., van de Sanden, M. C. M., Schmidt, J., Brendel, R., & Kessels, W. M. M. (2012). Surface passivation of phosphorus-diffused n(+)-type emitters by plasma-assisted atomic-layer deposited Al2O3. Physica Status Solidi-Rapid Research Letters, 6(1), 4-6. https://doi.org/10.1002/pssr.201105445 (Original work published 2012)

Bronneberg, A. C., van de Sanden, M. C. M., & Creatore, M. (2012). Remote plasma deposition of microcrystalline silicon thin-films: Film structure and the role of atomic hydrogen. Journal of Non-Crystalline Solids, 358(2), 379-386. https://doi.org/10.1016/j.jnoncrysol.2011.10.005 (Original work published 2012)

Knoops, H. C. M., Langereis, E., van de Sanden, M. C. M., & Kessels, W. M. M. (2012). Reaction mechanisms of atomic layer deposition of TaN(x) from Ta(NMe(2))(5) precursor and H(2)-based plasmas. Journal of Vacuum Science & Technology A, 30(1), 01A101. https://doi.org/10.1116/1.3625565 (Original work published 2012)

Law, F., Hoex, B., Wang, J., Luther, J., Sharma, K., Creatore, M., & van de Sanden, M. C. M. (2012). Kinetic study of solid phase crystallisation of expanding thermal plasma deposited a-Si:H. Thin Solid Films, 520(17), 5820-5825. https://doi.org/10.1016/j.tsf.2012.04.056 (Original work published 2012)

Ponomarev, M. V., Sharma, K., Verheijen, M. A., van de Sanden, M. C. M., & Creatore, M. (2012). Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer. Journal of Applied Physics, 111(6), 063715. https://doi.org/10.1063/1.3692439 (Original work published 2012)

Aresta, G., Palmans, J., van de Sanden, M. C. M., & Creatore, M. (2012). Evidence of the filling of nano-porosity in SiO2-like layers by an initiated-CVD monomer. Microporous and Mesoporous Materials, 151, 434-439. https://doi.org/10.1016/j.micromeso.2011.09.028 (Original work published 2012)

Ponomarev, M. V., Verheijen, M. A., Keuning, W., van de Sanden, M. C. M., & Creatore, M. (2012). Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (vol 112, 043708, 2012). Journal of Applied Physics, 112, 1. https://doi.org/10.1063/1.4747942 (Original work published 2012)

Sharma, K., Ponomarev, M. V., Verheijen, M. A., Kunz, O., Tichelaar, F. D., van de Sanden, M. C. M., & Creatore, M. (2012). Solid-phase crystallization of ultra high growth rate amorphous silicon films. Journal of Applied Physics, 111(10), 5. https://doi.org/10.1063/1.4717951 (Original work published 2012)

Dingemans, G., Einsele, F., Beyer, W., van de Sanden, M. C. M., & Kessels, W. M. M. (2012). Influence of annealing and Al2O3 properties on the hydrogen-induced passivation of the Si/SiO2 interface. Journal of Applied Physics, 111(9), 093713. https://doi.org/10.1063/1.4709729 (Original work published 2012)