M. Creatore

van Assche, F. J. H., Unnikrishnan, S., Michels, J. J., van Mol, A. M. B., van de Weijer, P., van de Sanden, M. C. M., & Creatore, M. (2014). On the intrinsic moisture permeation rate of remote microwave plasma-deposited silicon nitride layers. Thin Solid Films, 558(2 May 2014), 54-61. https://doi.org/http://dx.doi.org/10.1016/j.tsf.2014.02.069

Perrotta, A., van Beekum, E. R. J., Aresta, G., Jagia, A., Keuning, W., van de Sanden, M. C. M., … Creatore, M. (2014). On the role of nanoporosity in controlling the performance of moisture permeation barrier layers. Microporous and Mesoporous Materials, 188, 163-171. https://doi.org/10.1016/j.micromeso.2014.01.013

Bronneberg, A. C., Kang, X., Palmans, J., Janssen, P. H. J., Lorne, T., Creatore, M., & van de Sanden, M. C. M. (2013). Direct ion flux measurements at high-pressure-depletion conditions for microcrystalline silicon deposition. Journal of Applied Physics, 114(6), 063305. https://doi.org/10.1063/1.4817859

Premkumar, P. A., Starostin, S. A., de Vries, H., Creatore, M., Koenraad, P. M., & van de Sanden, M. C. M. (2013). Morphological Description of Ultra-Smooth Organo-Silicone Layers Synthesized Using Atmospheric Pressure Dielectric Barrier Discharge Assisted PECVD. Plasma Processes and Polymers, 10, 313–319. https://doi.org/10.1002/ppap.201200016

Sharma, K., Ponomarev, M. V., van de Sanden, M. C. M., & Creatore, M. (2013). On the effect of the underlying ZnO:Al layer on the crystallization kinetics of hydrogenated amorphous silicon. Applied Physics Letters, 102, 212107. https://doi.org/10.1063/1.4809517

Sharma, K., Verheijen, M. A., van de Sanden, M. C. M., & Creatore, M. (2012). In situ crystallization kinetics studies of plasma-deposited, hydrogenated amorphous silicon layers. Journal of Applied Physics, 111(3), 6. https://doi.org/10.1063/1.3681185 (Original work published 2012)

Bronneberg, A. C., van de Sanden, M. C. M., & Creatore, M. (2012). Remote plasma deposition of microcrystalline silicon thin-films: Film structure and the role of atomic hydrogen. Journal of Non-Crystalline Solids, 358(2), 379-386. https://doi.org/10.1016/j.jnoncrysol.2011.10.005 (Original work published 2012)

Ponomarev, M. V., Verheijen, M. A., Keuning, W., van de Sanden, M. C. M., & Creatore, M. (2012). Controlling the resistivity gradient in aluminum-doped zinc oxide grown by plasma-enhanced chemical vapor deposition (vol 112, 043708, 2012). Journal of Applied Physics, 112, 1. https://doi.org/10.1063/1.4747942 (Original work published 2012)

Sharma, K., Ponomarev, M. V., Verheijen, M. A., Kunz, O., Tichelaar, F. D., van de Sanden, M. C. M., & Creatore, M. (2012). Solid-phase crystallization of ultra high growth rate amorphous silicon films. Journal of Applied Physics, 111(10), 5. https://doi.org/10.1063/1.4717951 (Original work published 2012)

Aresta, G., Palmans, J., van de Sanden, M. C. M., & Creatore, M. (2012). Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition. Journal of Vacuum Science & Technology A, 30(4), 11. https://doi.org/10.1116/1.4711762 (Original work published 2012)