Aresta, G., Palmans, J., van de Sanden, M. C. M., & Creatore, M. (2012). Initiated-chemical vapor deposition of organosilicon layers: Monomer adsorption, bulk growth, and process window definition. Journal of Vacuum Science & Technology A, 30(4), 11. https://doi.org/10.1116/1.4711762 (Original work published 2025)
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