DIFFER
DIFFER Publication
Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Journal |
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
|
| Volume |
30
|
| Number |
6
|
| Number of Pages |
061512
|
| Publisher |
AVS
|
| PId |
98d41c0ba347dade686ab736da3c6e0a
|
| Alternate Journal |
J. Vac. Sci. Technol. A
|
Journal Article
|
|
| Download citation |
Citation
Bronneberg, A. C., Cankoy, N., van de Sanden, M. C. M., & Creatore, M. (2012). Ion-induced effects on grain boundaries and a-Si:H tissue quality in microcrystalline silicon films. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 30, 061512.