DIFFER
DIFFER Publication
A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H-2 discharges
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
1998
|
| Journal |
Czechoslovak Journal of Physics
|
| Volume |
48
|
| Number of Pages |
257-262
|
| Date Published |
1998
|
| ISBN Number |
0011-4626
|
| DOI | |
| PId |
7a0d6301a2c5306d1a6fe7bc9a580217
|
Journal Article
|
|
| Download citation |
Citation
Yan, M., & Goedheer, W. J. (1998). A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H-2 discharges. Czechoslovak Journal of Physics, 48, 257-262. https://doi.org/10.1007/s10582-998-0051-7 (Original work published 1998)