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DIFFER
DIFFER Publication
Atomic simulation of energetic fluorine interacting with Si(001)
Label
Value
Author
F. Gou
X. Lu
Q. Qian
J.Y. Tang
Year of Publication
2007
Journal
Nuclear Instruments & Methods in Physics Research B
Volume
265
Number of Pages
479-484
PId
ddbe767e9dfc604452d230b0a45c9d2a
Journal Article
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