DIFFER
DIFFER Publication
Atomic simulation of energetic fluorine interacting with Si(001)
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2007
|
| Journal |
Nuclear Instruments & Methods in Physics Research B
|
| Volume |
265
|
| Number of Pages |
479-484
|
| PId |
ddbe767e9dfc604452d230b0a45c9d2a
|
Journal Article
|
|
| Download citation |
Citation
Gou, F., Lu, X., Qian, Q., & Tang, J. Y. (2007). Atomic simulation of energetic fluorine interacting with Si(001). Nuclear Instruments & Methods in Physics Research B, 265, 479-484.