DIFFER
DIFFER Publication
Deposition of amorphous fluorosilane thin film on silicon surface: Atomic simulation
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2007
|
| Journal |
Journal of Non-Crystalline Solids
|
| Volume |
353
|
| Number |
44-46
|
| Number of Pages |
4186-4190
|
| Date Published |
11/2007
|
| ISBN Number |
0022-3093
|
| Accession Number |
ISI:000250971900025
|
| URL | |
| PId |
925db504d00f52f6061184ee53bb60f4
|
Journal Article
|
|
| Download citation |
Citation
Gou, F. J., Xu, M., Sun, W. L., & Chen, T. (2007). Deposition of amorphous fluorosilane thin film on silicon surface: Atomic simulation. Journal of Non-Crystalline Solids, 353, 4186-4190. Retrieved from <Go to ISI>://000250971900025 (Original work published 2007)