Nanoscale diffusion, compound formation and phase transitions in Mo/Si multilayer structures

Author	Vita de Rooij-Lohmann
Year of Publication	2010
Degree	PhD
Date Published	2010/10/01
Thesis Type	PhD
University	University of Twente
City	Enschede, Netherlands
URL	http://doc.utwente.nl/73280/
PId	b96c2a6d1d28e3fb99511e242abc47fb
	Thesis
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