High-resolution, high-reflectivity operation of lamellar multilayer amplitude gratings: identification of the single-order regime

High resolution while maintaining high peak reflectivities can be achieved for Lamellar Multilayer Amplitude Gratings (LMAG) in the soft-x-ray (SXR) region. Using the coupled waves approach (CWA), it is derived that for small lamellar widths only the zeroth diffraction order needs to be considered for LMAG performance calculations, referred to as the single-order regime. In this regime, LMAG performance can be calculated by assuming a conventional multilayer mirror with decreased density, which significantly simplifies the calculations. Novel analytic criteria for the design of LMAGs are derived from the CWA and it is shown, for the first time, that the resolution of an LMAG operating in the single-order regime is not limited by absorption as in conventional multilayer mirrors. It is also shown that the peak reflectivity of an LMAG can then still be as high as that of a conventional multilayer mirror (MM). The performance of LMAGs operating in the single-order regime are thus only limited by technological factors. (C) 2010 Optical Society of America