DIFFER
DIFFER Publication
Characterization of EUV induced contamination on multilayer optics
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2011
|
| Degree |
PhD
|
| Date Published |
07/2011
|
| Thesis Type |
PhD
|
| University |
University of Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789053354254
|
| URL | |
| PId |
392ef9c2ed444d8f16c34fc0e8206051
|
Thesis
|
|
| Download citation |
Citation
Chen, J. Q. (2011). Characterization of EUV induced contamination on multilayer optics (University of Twente). University of Twente, Enschede, Netherlands. Retrieved from http://doc.utwente.nl/77597/ (Original work published 2011)