DIFFER
DIFFER Publication
Physics and technology development of multilayer EUV reflective optics
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2012
|
| Degree |
PhD
|
| Date Published |
2012/11/23
|
| Thesis Type |
PhD
|
| University |
Universiteit Twente
|
| City |
Enschede, Netherlands
|
| ISBN Number |
9789090271637
|
| URL | |
| PId |
a421b8374580178645df5cabb7298203
|
Thesis
|
|
| Download citation |
Citation
Louis, E. (2012). Physics and technology development of multilayer EUV reflective optics (Universiteit Twente). Universiteit Twente, Enschede, Netherlands. Retrieved from http://doc.utwente.nl/82463/1/thesis_E_Louis.pdf (Original work published)