DIFFER

A. E. Yakshin

First name
A.
Middle name
E.
Last name
Yakshin
Yakshin, A. E., Kozhevnikov, I. V., Zoethout, E., Louis, E., & Bijkerk, F. (2010). Properties of broadband depth-graded multilayer mirrors for EUV optical systems. Optics Express, 18, 6957-6971. Retrieved from <Go to ISI>://000276602000050 (Original work published 2010)
de Rooij-Lohmann, V., Veldhuizen, L. W., Zoethout, E., Yakshin, A. E., van de Kruijs, R. W. E., Thijsse, B. J., … Bijkerk, F. (2010). Chemical interaction of B4C, B, and C with Mo/Si layered structures. Journal of Applied Physics, 108, 6. Retrieved from <Go to ISI>://000284270900129 (Original work published 2010)
Bruijn, S., van de Kruijs, R. W. E., Yakshin, A. E., Zoethout, E., & Bijkerk, F. (2010). Thermally induced decomposition of B4C barrier layers in Mo/Si multilayer structures. Surface & Coatings Technology, 205, 2469-2473. Retrieved from <Go to ISI>://000286343100091 (Original work published 2010)
Nedelcu, I., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. (2009). Microstructure of Mo/Si multilayers with B4C diffusion barrier layers. Applied Optics, 48, 155-160. Retrieved from <Go to ISI>://000262994200001 (Original work published 2009)
de Rooij-Lohmann, V., Kleyn, A. W., Bijkerk, F., Brongersma, H. H., & Yakshin, A. E. (2009). Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy. Applied Physics Letters, 94, 3. Retrieved from <Go to ISI>://000263409400084 (Original work published 2009)
Gou, F., Gleeson, M. A., Kleyn, A. W., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. (2009). Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500070
Nedelcu, I., van de Kruijs, R. W. E., Yakshin, A. E., von Blanckenhagen, G., & Bijkerk, F. (2008). Reflectivity and surface roughness of multilayer-coated substrate recovery layers for EUV lithographic optics. Optical Engineering, 47, 5. Retrieved from <Go to ISI>://000257884800009 (Original work published 2008)
van Herpen, M., van de Kruijs, R. W., Klunder, D. J. W., Louis, E., Yakshin, A. E., Alonso van der Westen, S., … Banine, V. (2008). Spectral-purity-enhancing layer for multilayer mirrors. Optics Letters, 33, 560-562. Retrieved from <Go to ISI>://000254907500010 (Original work published 2008)
Nedelcu, I., van de Kruijs, R. W., Yakshin, A. E., & Bijkerk, F. (2008). Thermally enhanced interdiffusion in Mo/Si multilayers. Journal of Applied Physics, 103, 6. Retrieved from <Go to ISI>://000255456200080 (Original work published 2008)
Nedelcu, I., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. (2007). Temperature-dependent nanocrystal formation in Mo/Si multilayers. Physical Review B, 76. Retrieved from <Go to ISI>://000251986600085 (Original work published 2007)