A. E. Yakshin

van de Kruijs, R. W. E., Zoethout, E., Yakshin, A. E., Nedelcu, I., Louis, E., Enkisch, H., … Bijkerk, F. (2006). Nano-size crystallites in Mo/Si multilayer optics. Thin Solid Films, 515, 430-433. Retrieved from <Go to ISI>://000241220600011 (Original work published 2006)

Nedelcu, I., van de Kruijs, R. W., Yakshin, A. E., Tichelaar, F., Zoethout, E., Louis, E., … Bijkerk, F. (2006). Interface roughness in Mo/Si multilayers. Thin Solid Films, 515, 434-438. Retrieved from <Go to ISI>://000241220600012 (Original work published 2006)

Dobrovolskiy, S., Yakshin, A. E., Kessels, M. J. H., & Verhoeven, J. (2005). The application of energetic CHx+ ions to form a Si/SiC multilayer system for reflection of radiation between 20 and 80 nm. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms, 237, 533-542. Retrieved from <Go to ISI>://000231777800006 (Original work published 2005)

Kessels, M. J. H., Verhoeven, J., Yakshin, A. E., Tichelaar, F. D., & Bijkerk, F. (2004). Ion beam induced intermixing of interface structures in W/Si multilayers. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms, 222, 484-490. Retrieved from <Go to ISI>://000223121800016 (Original work published 2004)

Abdali, S., Gerward, L., Yakshin, A. E., Louis, E., & Bijkerk, F. (2002). Determination of crystallization as a function of Mo layer thickness in Mo/Si multilayers. Materials Research Bulletin, 37, 279-289. Retrieved from <Go to ISI>://000175048300009 (Original work published 2002)

Stuik, R., Louis, E., Yakshin, A. E., Gorts, P. C., Maas, E. L. G., Bijkerk, F., … Haidl, M. (1999). Peak and Integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography. Journal of Vacuum Science & Technology B, 17, 2998-3002. https://doi.org/10.1116/1.590942 (Original work published 1999)