DIFFER
DIFFER Publication
Ion beam induced intermixing of interface structures in W/Si multilayers
| Label | Value |
|---|---|
| Author | |
| Year of Publication |
2004
|
| Journal |
Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms
|
| Volume |
222
|
| Number |
3-4
|
| Number of Pages |
484-490
|
| Date Published |
08/2004
|
| ISBN Number |
0168-583X
|
| Accession Number |
ISI:000223121800016
|
| URL | |
| PId |
4363533dc658f4b4d5ee4548e476256e
|
Journal Article
|
|
| Download citation |
Citation
Kessels, M. J. H., Verhoeven, J., Yakshin, A. E., Tichelaar, F. D., & Bijkerk, F. (2004). Ion beam induced intermixing of interface structures in W/Si multilayers. Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions With Materials and Atoms, 222, 484-490. Retrieved from <Go to ISI>://000223121800016 (Original work published 2004)