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Properties of broadband depth-graded multilayer mirrors for EUV optical systems

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Abstract

The optical properties of a-periodic, depth-graded multilayer mirrors operating at 13.5 nm wavelength are investigated using different compositions and designs to provide a constant reflectivity over an essentially wider angular range than periodic multilayers. A reflectivity of up to about 60% is achieved in these calculation in the [0, 18 degrees] range of the angle of incidence for the structures without roughness. The effects of different physical and technological factors (interfacial roughness, natural interlayers, number of bi-layers, minimum layer thickness, inaccuracy of optical constants, and thickness errors) are discussed. The results from an experiment on the fabrication of a depth-graded Mo/Si multilayer mirror with a wide angular bandpass in the [0, 16 degrees] range are presented and analyzed. (C) 2010 Optical Society of America

Year of Publication
2010
Journal
Optics Express
Volume
18
Number
7
Number of Pages
6957-6971
Date Published
Mar
Type of Article
Article
ISBN Number
1094-4087
Accession Number
ISI:000276602000050
URL
PId
7201d0048cbb720e0e651a6fc44ee0b3
Alternate Journal
Opt. Express
Journal Article
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