F. Bijkerk

Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). In-depth agglomeration of d-metals at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000264774000156 (Original work published 2009)

Nedelcu, I., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. (2009). Microstructure of Mo/Si multilayers with B4C diffusion barrier layers. Applied Optics, 48, 155-160. Retrieved from <Go to ISI>://000262994200001 (Original work published 2009)

de Rooij-Lohmann, V., Kleyn, A. W., Bijkerk, F., Brongersma, H. H., & Yakshin, A. E. (2009). Diffusion and interaction studied nondestructively and in real-time with depth-resolved low energy ion spectroscopy. Applied Physics Letters, 94, 3. Retrieved from <Go to ISI>://000263409400084 (Original work published 2009)

Chen, J. Q., Louis, E., Lee, C. J., Wormeester, H., Kunze, R., Schmidt, H., … Bijkerk, F. (2009). Detection and characterization of carbon contamination on EUV multilayer mirrors. Optics Express, 17, 16969-16979. Retrieved from <Go to ISI>://000269736100067 (Original work published 2009)

Wu, S. M., van de Kruijs, R., Zoethout, E., & Bijkerk, F. (2009). Sputtering yields of Ru, Mo, and Si under low energy Ar+ bombardment. Journal of Applied Physics, 106, 6. Retrieved from <Go to ISI>://000269850300134 (Original work published 2009)

Gou, F., Gleeson, M. A., Kleyn, A. W., van de Kruijs, R. W. E., Yakshin, A. E., & Bijkerk, F. (2009). Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation. Elsevier Science Bv. Retrieved from <Go to ISI>://000271349500070

Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). Chemically mediated diffusion of d-metals and B through Si and agglomeration at Si-on-Mo interfaces. Journal of Applied Physics, 105, 5. Retrieved from <Go to ISI>://000266500100134 (Original work published 2009)

Chen, J. Q., Lee, C. J., Louis, E., Bijkerk, F., Kunze, R., Schmidt, H., … Moors, R. (2009). Characterization of EUV induced carbon films using laser-generated surface acoustic waves. Elsevier Science Sa. Retrieved from <Go to ISI>://000267737000017

Tsarfati, T., Zoethout, E., van de Kruijs, R., & Bijkerk, F. (2009). Growth and sacrificial oxidation of transition metal nanolayers. Surface Science, 603, 1041-1045. Retrieved from <Go to ISI>://000265310000013 (Original work published 2009)

Tsarfati, T., van de Kruijs, R. W., Zoethout, E., Louis, E., & Bijkerk, F. (2009). Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography. Thin Solid Films, 518, 1365-1368. Retrieved from <Go to ISI>://000272861500002 (Original work published 2009)