Yan, M., & Goedheer, W. J. (1998). A kinetic simulation of the effect of frequency on the power dissipation in VHF SiH4/H-2 discharges. Czechoslovak Journal of Physics, 48, 257-262. https://doi.org/10.1007/s10582-998-0051-7 (Original work published 1998)
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