M. C. M. van de Sanden

Leick, N., Verkuijlen, R. O. F., Lamagna, L., Langereis, E., Rushworth, S., Roozeboom, F., … Kessels, W. M. M. (2011). Atomic layer deposition of Ru from CpRu(CO)(2)Et using O-2 gas and O-2 plasma. Journal of Vacuum Science & Technology A, 29(2), 021016. https://doi.org/10.1116/1.3554691 (Original work published 2011)

Sharma, K., Branca, A., Illiberi, A., Tichelaar, F. D., Creatore, M., & van de Sanden, M. C. M. (2011). On the Effect of the Amorphous Silicon Microstructure on the Grain Size of Solid Phase Crystallized Polycrystalline Silicon. Advanced Energy Materials, 1(3), 401-406. https://doi.org/10.1002/aenm.201000074 (Original work published 2011)

Profijt, H. B., Potts, S. E., van de Sanden, M. C. M., & Kessels, W. M. M. (2011). Plasma-Assisted Atomic Layer Deposition: Basics, Opportunities, and Challenges. Journal of Vacuum Science & Technology A, 29(5), 26. https://doi.org/10.1116/1.3609974 (Original work published 2011)

Beyene, H. T., Tichelaar, F. D., Verheijen, M. A., van de Sanden, M. C. M., & Creatore, M. (2011). Plasma-Assisted Deposition of Au/SiO2 Multi-layers as Surface Plasmon Resonance-Based Red-Colored Coatings. Plasmonics, 6(2), 255-260. https://doi.org/10.1007/s11468-010-9197-9 (Original work published 2011)

van Harskamp, W. E. N., Brouwer, C. M., Schram, D. C., van de Sanden, M. C. M., & Engeln, R. (2011). Population inversion in a magnetized hydrogen plasma expansion as a consequence of the molecular mutual neutralization process. Physical Review E, 83(3), 036412. https://doi.org/10.1103/PhysRevE.83.036412 (Original work published 2011)

Dingemans, G., Clark, A., van Delft, J. A., van de Sanden, M. C. M., & Kessels, W. M. M. (2011). Er3+ and Si luminescence of atomic layer deposited Er-doped Al2O3 thin films on Si(100). Journal of Applied Physics, 109(11), 9. https://doi.org/10.1063/1.3595691 (Original work published 2011)

Illiberi, A., Kudlacek, P., Smets, A. H. M., Creatore, M., & van de Sanden, M. C. M. (2011). Effect of ion bombardment on the a-Si:H based surface passivation of c-Si surfaces. Applied Physics Letters, 98(24), 3. https://doi.org/10.1063/1.3601485 (Original work published 2011)

Zaharia, T., Kudlacek, P., Creatore, M., Groenen, R., Persoone, P., & van de Sanden, M. C. M. (2011). Improved adhesion and tribological properties of fast-deposited hard graphite-like hydrogenated amorphous carbon films. Diamond and Related Materials, 20(9), 1266-1272. https://doi.org/10.1016/j.diamond.2011.08.003 (Original work published 2011)

Jariwala, B. N., Kramer, N. J., Petcu, M. C., Bobela, D. C., van de Sanden, M. C. M., Stradins, P., … Agarwal, S. (2011). Surface Hydride Composition of Plasma-Synthesized Si Nanoparticles. Journal of Physical Chemistry C, 115(42), 20375-20379. https://doi.org/10.1021/jp2028005 (Original work published 2011)

Hansen, T. A. R., Colsters, P. G. J., van de Sanden, M. C. M., & Engeln, R. (2011). Investigating the flow dynamics and chemistry of an expanding thermal plasma through CH(A-X) emission spectra. Journal of Physics D-Applied Physics, 44(35), 355205. https://doi.org/10.1088/0022-3727/44/35/355205 (Original work published 2011)